Abstract
The CO2 laser mitigation method has been developed to mitigate the ultraviolet laser damage site on a fused silica surface. The mitigation process was monitored by an on-line white light scattering imaging system in order to ensure that the mitigation is successful. Additionally, a total internal reflection microscope was utilized to analyze the mitigation pit. By optimizing the laser mitigation parameters, the rough damage site can be replaced by a smooth Gaussian-shaped mitigation pit. The chemical composition of the damage sites and the CO2 laser mitigation pits was also measured with energy dispersive x-ray spectroscopy. It reveals that the oxygen defi- ciency center defect of the ultraviolet laser damage site is removed after CO2 laser mitigation, which helps us better understand the CO2 laser mitigation process.©2014 Society of Photo-Optical Instrumentation Engineers (SPIE)(DOI:10.1117/ 1.OE.53.8.084107)
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