Abstract
Unadded and 0.5 mol% Pd-added ZnO bulk and thin films were prepared by sintering and sputtering, respectively, and their CO gas sensing properties were investigated. The effects of Pd addition, sensing temperature (100–500 °C), and humidity on the CO gas response were discussed. In the bulk sensors, Pd-addition lowered the temperature for the maximum CO gas response (sensitivity) from 400 to 300 °C, whereas the thin film sensors (unadded and Pd-added) exhibited maximum gas response at 200 °C. The Pd-addition enhanced the CO gas response in thin film sensors, and it was also effective for reducing the interference from humidity in both bulk and thin film sensors.
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