Abstract
The Co-based granular thin films were deposited on the flexible substrate (Kapton) by magnetron sputtering. The films comprise of Co nanocrystallites and small amount of amorphous (Al,O)-rich inter-granular phase and have the electric resistivities in the range 50–120 μΩ cm, depending on the composition and thickness. The as-deposited films with thickness <80 nm have low coercivity (<20 Oe along hard direction), high permeability (up to 500) and resonance frequency up to 2.5 GHz. Compared to the rigid films, the flexible films have relatively higher coercivity and lower resonance frequency. A comparison between Co-based granular films and FeTaN continuous films has also been discussed.
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