CMOS sensors for X-ray detection

Abstract

Complementary metal–oxide–semiconductor (CMOS) sensors may offer improved performance compared to the charge-coupled devices common in X-ray satellites. We demonstrate x-ray detection in the soft x-ray band (250 to 1700 eV) by a commercially available back-illuminated CMOS sensor using the Advanced Photon Source at Argonne National Laboratory. While operating the device at room temperature, we measure energy resolutions (FWHM) of 48 eV at 250 eV and of 83 eV at 1700 eV, which are comparable to the performance of the CCD on Chandra and Suzaku.