Abstract
An integrated 8 × 8 element 3D force sensor array was developed for tactile sensing. The 300 × 300 μm 2 sensors are formed from mono-crystalline silicon membranes with spacing of 700 μm. The signals of the individual transducers are read out line-by-line via an on-chip CMOS decoder. The porous silicon bulk micromachining was implemented as one of the final steps of the n-well CMOS compatible processing.
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