Abstract
A compact multimode interference (MMI) coupler based polarization beam splitter (PBS) is proposed and realized, which is fabrication-tolerant and fully compatible with standard silicon photonic foundry processes. The PBS on the 220nm silicon strip waveguide is as small as 4.2μm×132.64μm. Besides, the simulated fabrication tolerances of the width, the length and the etching depth are more than 100nm (80nm), 5μm (5.65μm) and 60nm (120nm) for TE (TM) mode, respectively. In addition, the experimental results demonstrate that the bandwidth is about 26nm with the extinction ratio better than 15dB.
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