CMOS-Based Monolithic Controllers for Smart Sensors Comprising Micromembranes and Microcantilevers

Abstract

This paper presents design considerations and implementations of monolithic controllers for smart sensors that make use of micromachined structures such as micromembranes and microcantilevers. Five control techniques are reviewed, and the classic control technique is selected for the design of the controllers. The circuit implementations of an analog proportional controller and a digital proportional-integral-derivative controller are described in detail. The first controller is used for controlling the microhotplate (micromembrane) temperature of a monolithic metal-oxide gas sensor array. The second controller is used for controlling the microcantilever deflection of a monolithic atomic force microscope. The controllers and microsensors are fabricated in standard 0.8-mum CMOS technology combined with post-CMOS micromachining. Chemical measurements and contact-mode imaging are performed to confirm the excellent performance of these monolithic controllers