Abstract
Energetic cluster ion impact on solid surfaces can be used to deposit large quantities of kinetic energy in small assemblies of atoms in the surface. Extremely high transient pressures and increases in the density of surface atoms are produced by these impact processes. Significant alteration of surface structure is expected. We have investigated the effects of bombardment of thin carbon films with singly charged clusters of argon atoms and protonated water molecules accelerated to energies as high as 300 kV. Clusters were generated in weakly ionized plasmas produced by a corona discharge at atmospheric pressure in helium carrier gas. The singly charged seed ions in this discharge served as nuclei in the expanding gas mixture that was introduced into a high vacuum system through a super sonic nozzle and a differentially pumped skimmer.
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Schedule a callMore From: Proceedings, annual meeting, Electron Microscopy Society of America
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