Abstract
The collisions of 5.7 keV silicon atom and clusters with a silicon surface are simulated by molecular dynamics. Using a parameter surveillance system for simultaneous execution of multiple simulations on parallel/distributed computers, we have studied the impact dependence of cluster ions on the surface. The channeling effect of the implanted atoms is inevitable in the single-atom case, but is suppressed by the macroscopic vibrations of the surface in the cluster-ion case.
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