Abstract
We have experimentally studied the process of secondary ion emission from GaP, GaAs, GaSb and InSb targets under MeV-energy heavy ion bombardment. Obtained feature of the secondary ion emission depends characteristically on the target species. Large cluster ions composed of Sb and In were produced respectively from the GaSb and InSb targets. The yield of the Sb clusters decreases exponentially with increasing size, while that of the In clusters shows a power law dependence on the size. These results show that the Sb clusters are formed through a coagulation of small molecules emitted from the GaSb target in the selvage region near the surface, and the In clusters are emitted directly from the InSb surface as clusters.
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Schedule a callMore From: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
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