Abstract
We report the observation by scanning electron microscopy, spatially resolved Auger electron spectroscopy, and atomic force microscopy of the thermal evolution of a microsized array of carbon dots, fabricated using supersonic cluster beam deposition through a stencil mask. We show that it is possible to obtain ordered arrays of silicon carbide microsized dots by reaching the temperature necessary for the creation of Si–C bonds, without affecting the geometry of the pristine pattern.
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