Abstract
Atomic layer deposition (ALD) is a typical process with wafer revisiting that should be performed by cluster tools. This paper discusses the scheduling problem of single-arm cluster tools for the ALD process. In scheduling such system, the most difficult part is to schedule the revisiting process and obtain its optimal cycle time. This paper studies the revisiting process of ALD with revisiting times k = 3, 4, and 5. Analytical expressions are obtained to calculate the cycle time for the k possible schedules with k = 3, 4, and 5, respectively, so as to obtain the optimal one. In this way, the scheduling problem of such a revisiting process becomes simple and this is a significant improvement in scheduling cluster tools with wafer revisiting.
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