Abstract

Small samples of DNA can be replicated (amplified) using the polymerase chain reaction (PCR) to produce sufficient quantities for analysis in the diagnosis of disease and in forensics. Low-cost single-shot PCR devices are desirable to avoid potential contamination of the sample reaction with products of a previous reaction. After explaining the principles of PCR amplification and optical detection of the products this paper describes the fabrication of a micromachined silicon/Pyrex-based chip for the PCR using standard micromachining processes. The reaction chamber has a volume of 1 μl. Pyrex is used for sealing the chamber and its transparency enables the use of optical detection methods. Incorporated heating and sensing elements allow fast heating and control of the chip. A Peltier element is used for cooling the chip to achieve rapid temperature cycling. Some performance data are presented.

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