Abstract
Close-packed arrays of microplasma jets, propagating into atmospheric air with uniform plume length and luminosity, have been generated in cylindrical microchannels and characterized. Arrays as large as 8 <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex Notation="TeX">$\times$</tex></formula> 8 with a packing density of <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex Notation="TeX">$\sim\!\!160\ \hbox{cm}^{-2}$</tex></formula> have been demonstrated to date. Fabricated in a molded flexible polymer that is transparent deep into the ultraviolet <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex Notation="TeX">$(\lambda \gtrsim 250\ \hbox{nm})$</tex></formula> , microchannel devices <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex Notation="TeX">$ \lesssim\ 350\ \mu\hbox{m}$</tex></formula> in diameter generate plasma in He feedstock gas with a backing pressure of 760–900 Torr and flow rates up to 4.6 standard liters per minute. Chemical kinetics of the He <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex Notation="TeX">$(2^{1, 3}\hbox{S})$</tex></formula> and <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex Notation="TeX">$ \hbox{He}_{2}$</tex></formula> <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex Notation="TeX">$(a^{3}\Sigma_{u}^{+})$</tex></formula> excited species interacting with laboratory air has been examined by optical emission spectroscopy. The maximum jet length for a 5 <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex Notation="TeX">$\times$</tex></formula> 5 array is <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex Notation="TeX"> $3.8 \pm 0.2$</tex></formula> mm when the He backing pressure is <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex Notation="TeX">$840 \pm 20$ </tex></formula> Torr. Relative to previous jet array designs, this technology increases the jet packing density by more than an order of magnitude and yet jet–jet interactions are not observed.
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