Cleanness Evaluation Method of Remaining Dirt on Inner Surface of Narrow Tubule by IR Spectroscopy

Abstract

We try to develop a new measurement method for cleanliness evaluation of inner surface of narrow tubule.In this measurement method, we use the infrared spectroscopy and the partial least squares regression (PLSR).The absorption spectrum is measured by using fiber probe and cone mirror.We measure the spectra of the known amount of dirt.We build a calibration curve using these spectra and the PLSR.Next, we measured spectrum of inner surface of narrow tubule, and calculates the amount of remaining this dirt by the calibration curve.This method can be measured in a non-contact and non-destructive.This method can identify the remaining position and the type and amount of dirt.In this paper, we propose this measurement method as new cleanliness evaluation method has overcome the problems that exist in the cleanliness evaluation.