Abstract
An overview of the recent status of the analytical works of the structure and properties of diamond-like carbon (DLC) films is presented from the viewpoint of DLC classification. First, the structure, processing, and properties of the DLC films reported up to now are summarized. Four typical amorphous structures are formed using several vapor deposition methods. The density and refractive index of the DLC films are strongly affected by the structure of the DLC films. Secondly, several evaluation projects of the DLC films, which have been carried out since 2006 in Japan, are explained. The evaluation projects involve round-robin tests in which the structure and properties of the DLC films fabricated by numerous methods are evaluated using appropriate equipments. The results of the round-robin tests suggest that the DLC films can be classified on the basis of not only their structure but also their properties.
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