Classical dynamics simulation of projectile-surface interactions

Abstract

A public-domain package of programs for the personal computer, the Simulation Kit (SK), has been developed for the simulation and visualization of collisions of low-energy (<10 keV) atomic projectiles with solid target lattices. Possible applications of the SK include the simulation of ion scattering spectra, sputtering coefficients, reflection coefficients and projectile ranges. The simulation model used by the SK is based on classical dynamics, and uses a composite screened-Coulomb/Morse pair potential to model interactions between particles in the target. The simulation model also incorporates inelastic scattering effects based on the Lindhard–Schiott–Scharff, Oen–Robinson and Shapiro–Tombrello models, respectively. The physical basis of the simulation model is described, and examples are provided of applications in ion beam analysis (ion scattering spectrometry, sputter yields). Copyright © 1998 John Wiley & Sons, Ltd.