Abstract

Boundary constraint induced inhomogeneous effects are important for mechanical responses of nano/micro-devices. For microcantilever sensors, the clamped-end constraint induced inhomogeneous effect of static deformation, so called the clamped-end effect, has great influence on the detection signals. This paper is devoted to developing an alternative mechanical model to characterize the clamped-end effect on the static detection signals of the DNA-microcantilever. Different from the previous concentrated load models, the DNA adsorption is taken as an equivalent uniformly distributed tangential load on the substrate upper surface, which exactly satisfies the zero force boundary condition at the free-end. Thereout, a variable coefficient differential governing equation describing the non-uniform deformation of the DNA-microcantilever induced by the clamped-end constraint is established by using the principle of minimum potential energy. By reducing the order of the governing equation, the analytical solutions of the curvature distribution and static bending deflection are obtained. By comparing with the previous approximate surface stress models, the clamped-end effect on the static deflection signals is discussed, and the importance of the neutral axis shift effect is also illustrated for the asymmetric laminated microcantilever.

Highlights

  • During the past decades, nano/micro-beam based detection sensors have received significant attention due to their benefits of extreme sensitivity, fast response, low cost, and high integratability[1]

  • Various numerical approaches have been developed to characterize the influence of surface effects on the mechanical properties of nano/micro-materials, such as classical molecular dynamics (MD)[7,8] and finite element method (FEM)[9,10,11,12]

  • This paper aims to develop an effective mechanical model for static detection signals of DNA-microcantilever, considering the clamped-end effect which implies the inhomogeneous effect of the static deformation induced by the clamped-end constraint

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Summary

Introduction

Nano/micro-beam based detection sensors have received significant attention due to their benefits of extreme sensitivity, fast response, low cost, and high integratability[1]. Driven by those remarkable physical properties, nano/micro-beam sensors c The Author(s) 2021. As one of the most important cornerstone of microcantileverbased static detection technology, the curvature analysis based Stoney’s formula has been widely used to describe the quantitative relationship between the surface stress and bending deformation of microcantilever under the essential assumption of uniform curvature deformation[13,14]. Under certain experimental conditions, this approximation might be unreasonable

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