Abstract

This paper describes investigations of CIS solar cells with ZnO buffer layers. Studies concentrate on determining optimum ZnO buffer layer properties that will yield the maximum ZnO/CIS solar cell efficiency. Buffer layers are grown by chemical vapor deposition (CVD) by reacting a zinc adduct with tetrahydrofuran to grow ZnO. Substrate temperatures (T/sub sub/) have been varied from 100/spl deg/C to 350/spl deg/C, with the best device performance obtained for T/sub sub//spl ap/225/spl deg/C to 250/spl deg/C. ZnO/CIS solar cells were fabricated by first depositing a ZnO buffer layer, followed by deposition of a low resistivity ZnO top contact layer and a Al/Ag collector grid. Several cells have been fabricated with an area of 0.44 cm/sup 2/ that have total area efficiencies greater than 11%. In particular, a cell was fabricated with a Siemens substrate that exhibited a total area efficiency of 11.3%, and one based on a NREL substrate that has a total area efficiency of 12%. This work has focused on determining optimum deposition parameters for CVD ZnO buffer layers. It is clear that in order to achieve efficient ZnO/CIS cells, the buffer layer must be deposited with a high resistivity.

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