Abstract

With the development of MEMS technology, it is necessary to study piezoelectric semiconductor which is very important in intelligent device materials. In this work, the propagation characteristics of circumferential SH waves in piezoelectric semiconductor curved plates are investigated by using the Legendre orthogonal polynomial method(LOPM). The proposed method can be used to solve the eigenvalue problem in wavenumber without iterations to obtain the full solution. Through numerical comparisons with the results from the global matrix method (GMM), the validity of the presented method is illustrated. Numerical examples show clearly the effects of radius-thickness ratio and steady-state carrier density on dispersion and attenuation of circumferential SH waves.

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