Abstract
Abstract Piezoelectric scandium aluminium nitride (Sc x Al 1-x N) thin films are very promising candidates for applications in micro- electromechanical systems due to enhanced piezoelectric properties. To study the influence of deposition parameters on the piezoelectric response, Sc x Al 1-x N with x = 27% Sc was deposited by reactive sputtering. For determination of piezoelectric constants, platinum electrodes were utilized to measure the piezoelectric deflection via Laser Doppler Vibrometry and compared to finite element simulations. A new electrode design for enhanced accuracy and reduction of computational effort is introduced. Circularly arranged ring electrodes (‘bull's eye’) enable the precise and simultaneous determination of d 31 and d 33 .
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