Abstract
A circular-aperture Modified Hartmann Mask (cMHM) for quadriwave lateral shearing interferometry is proposed. The cMHM features in the hybrid structure consisting of a phase chessboard and a circular-aperture array, which is easy to manufacture. The diffraction properties of cMHM are numerically analyzed. By choosing the radius of the circular aperture to be the first positive root of Bessel function, the intensities of parasitic diffraction orders are largely diminished. In the simulations, the parasitic errors are evaluated from the perspectives of both extraction error and reconstruction error. The parasitic error of cMHM is about only half of the parasitic error of MHM. In the experiments, a compact cMHM-based lateral shearing interferometer has been built. Wavefront measurement results obtained by cMHM-LSI are compared with those obtained by commercial wavefront sensor, and the results correspond with each other well. The adaptability and accuracy of the proposed cMHM are validated.
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