Abstract
Here we present a ‘circuit edit’ concept for superconducting microcircuits that operate atT≤4.2 Kmaking use of superconducting material fabricated using focused ion beam induced deposition (FIBID)with W(CO)6 as the precursor gas. This material has been recently used to fabricate superconducting nanowireswith a critical temperature of 5.2 K. Circuit edit consists of using FIB technology with thepossibilities for local patterning with nanometer resolution, to modify or repair highly valuable low-TC superconducting devices such SQUIDs, Josephson junction array voltage standards, ortransition edge sensors.
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