Abstract
Analytical electron microscopy is employed to correlate Cr segregation in Co/sub 34/Cr/sub 12/Ta/sub 4//Cr and Co/sub 76/Cr/sub 12/Pt/sub 12//Cr films with specific microstructural features such as grain boundary misorientation. Energy-filtered (EFTEM) chemical maps show that Cr segregation occurs independently of the Cr underlayer, and is highly alloy dependent. The CoCrTa film contained extensive grain boundary Cr enrichment whereas EFTEM images from the CoCrPt media show homogeneous Cr distribution. No statistically significant Ta or Pt segregation was observed. EFTEM elemental maps and energy dispersive spectroscopy (EDS) indicate that grain boundary Cr segregation depends on the type of boundary. Quantitative analysis of the Cr levels using nanoprobe EDS shows that the random angle grain boundaries contain more Cr (23/spl plusmn/4 at%) than 90/spl deg/ boundaries (17/spl plusmn/4 at%). EDS and EFTEM composition profiles show Cr enriched grain boundaries surrounded by regions of Cr depletion.
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