Chromatic confocal matrix sensor with actuated pinhole arrays.

Abstract

We present two versions of a chromatic confocal matrix sensor for the snapshot acquisition of three-dimensional objects. The first version contains separate illumination and detection pinhole arrays, while the second version uses a single pinhole array in double pass. The discrete lateral measurement points defined by the illumination and detection pinhole arrays are evaluated in parallel with a hyperspectral detection module. As this approach enables the spectrometric evaluation of all lateral channels, multilayer objects can be analyzed. To increase the lateral resolution the pinhole arrays are moved by micromechanical actuators. The paper includes a quantitative evaluation of the chromatic confocal module and proof-of-principle experiments with the full sensor system.