Abstract
High sensitivity chlorine (Cl 2) gas detection has been realized by newly developed gas sensors using Mg-phthalocyanine (MgPc) thin films. The MgPc thin film gas sensors exhibited an increase of conductivity with exposure to Cl 2 gas. The sensing properties of the MgPc thin film gas sensors were strongly dependent on the preparation conditions of MgPc thin films. The highest sensitivity for Cl 2 gas was obtained in the gas sensor using MgPc thin film prepared under the optimized preparation conditions; substrate temperature of 180 °C, evaporation temperature of 475 °C and film thickness of 40 nm. It was obtained that at operating temperature of 200 °C, the sensitivity of the MgPc thin film gas sensor linearly increased with the Cl 2 gas concentration in the range of 0.18–35 ppm.
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