Chip-Level Active Temperature Control for Improving Temperature Robust of a Micro-Gyroscope

Abstract

Silicon micro-fabricated gyroscope are very sensitive to ambient temperature, this paper conducted a novel active temperature controlling system. Combined with the PTC thermistor to detect internal temperature and the inserted TEC to control the temperature, encapsulation condition inside the gyroscope was kept in a stable situation. Experimental results showed that it greatly improved the performance of the micro-gyroscope.