Abstract
We present a study of the chemical and atomic properties of 5nm TiO2-terminated BaTiO3 (001) epitaxial films on Nb-doped SrTiO3, as a function of the atomic oxygen plasma power for film growth. Lower plasma power produces non-stoichiometric films with oxygen vacancies and Ti3+ ions. The larger Ti3+ ion radius and the in-plane clamping gives rise to an increase in the out-of-plane lattice parameter. XPS measures the Ti3+ concentration and the concomitant increase in dissociative water uptake in the film, giving rise to on-top OH− adsorption on surface Ti, proton adsorption on surface oxygen, and a near surface Ba-OH environment.
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