Abstract
Chemical vapour deposition of molybdenum on graphite by a carbonyl process was investigated at deposition temperatures in the range 400600°C. The deposit obtained at 400°C exhibited a domed surface, while those prepared at higher temperatures showed a typical faceted surface with columnar grains. The hardness of the deposit obtained at 600°C was very similar to that of massive molybdenum and its value increased with decreasing deposition temperature. The results of post-deposition annealing of the coatings showed that the deposited molybdenum layer was transformed into a layer of Mo 2C for annealing temperatures exceeding 900°C. Irradiation experiments with 40 keV He + ions were carried out, and the results indicated that significant surface damage due to blistering and exfoliation occurred for polished surfaces, whereas blister exfoliation was rarely observed for asdeposited surfaces.
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