Abstract

The chemical vapor transport and homoepitaxial growth of ZnTe are investigated in the ZnTe-HCl closed-tube system. The transport rate increases monotonically until 0.1 mg/cm 3 and then increases rapidly with the increase of HCl concentration. The growth rate of the (110) epi-layer has the same HCl concentration dependence as the transport rate. The surface morphology of epitaxial layers grown on (110) substrate is uneven, while that on (110) substrate is relatively smooth. Large amounts of dendritic crystals are observed deposited on the ampoule at high HCl concentration where the high transport rate occurs. The experimentally obtained transport rate can be explained quantitatively over the whole range of HCl concentration using thermodynamic calculations considering laminar, diffusion and convection flows.

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