Abstract
The sensitivity of piezoelectric Detectors and surface acoustic wave (SAW) devices is directly proportional to the square of the resonant frequency, and is inversely proportional to the surface area. Therefore, a SAW device is considered to be an excellent transducer for a chemical vapor sensor because the oscillation frequency of a SAW device can be two or three orders of magnitude higher than that of an AT-cut quartz crystal resonator. Moreover, the surface area of a SAW resonator is very small, and thus an increase in sensitivity can be expected for SAW devices. As well as being sensitive, SAW devices can be miniaturized with precise and reproducible characteristics using photolithographic techniques. In addition, the lithographic fabrication capability easily permits a complex circuit to be present on the same crystal surface.
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