Chemical Vapor Deposition of Tantalum Carbide in the TaBr5–CCl4–Cd System

Abstract

The tantalum carbide coatings were deposited on substrates made of 12Kh18N10T steel, ZhC6 alloy, and molybdenum by reduction of TaBr5 and CCl4 vapors with cadmium vapors at temperatures of 950–1000 K. The average deposition rate of coatings on molybdenum was ~5 μm/h, on ZhC6 alloy was ~6 μm/h, and on 12Kh18N10T steel was ~8 μm/h. The coatings were formed as columnar grains on the substrate surface and as a diffuse layer in the substrate material. The surface layers contained mainly tantalum monocarbide TaCy (y = 0.72–0.86) and a small fraction of tantalum. The coatings on the surface of ZhC6 alloy and 12Kh18N10T steel flaked off with increasing thickness, which was due to different thermal expansion of the coating and substrate, as well as concentration inhomogeneity and phase transitions in the substrate material during coating deposition and during the heating and cooling processes.