Chemical vapor deposition of pyrolytic boron nitride ceramics from single source precursor

Abstract

Abstract Pyrolytic boron nitride ceramics were prepared on graphite substrates from borazine as the single source precursor by hot-wall chemical vapor deposition in deposition temperature range from 1300 °C to 1600 °C with a total pressure of 200 Pa. The chemical composition and the effect of deposition temperature on the morphology, phase, and structure of the pyrolytic boron nitride were investigated. A high purity product with stoichiometric B/N ratio is obtained. The deposition surface of the product exhibited a pebble-like structure, and the fracture surface showed an apparent laminar structure having a preferential (002) orientation parallel to the surface of the substrate at temperatures above 1400 °C. The product contained some turbostratic and amorphous boron nitride as evidenced from XRD and FTIR examinations. With the increase of deposition temperature, the crystallinity of the pyrolytic boron nitride increased with the turbostratic and amorphous boron nitride turned into hexagonal structure, and the crystallinity of the product became higher.