Abstract

Chemical vapor deposition was applied to synthetize nanostructured deposits containing several sorts of nanoobjects (i.e., nanoballs, irregular particles, and nanowires). Analytical techniques, that is, high-resolution transmission electron microscopy, scanning electron microscopy, electron dispersive X-ray analysis, selected area electron diffraction, and X-ray photoelectron spectroscopy, showed that unlike nanoballs and particles composed of crystalline germanium, the layer was made of chromium germanide CrGex. The nanowires possessed a complex structure, namely a thin crystalline germanium core and amorphous CrGex coating. The composition of the nanowire coating was [Cr]/[Ge] = 1:(6–7). The resistance of the nanowire–deposit system was estimated to be 2.7 kΩ·cm using an unique vacuum contacting system.

Highlights

  • Metal silicides and germanides belong to an extensively studied group of materials offering a wide variety of properties to meet various requirements in battery, optical, and electronic applications, as well as catalysis

  • Molybdenum substrates that were placed at the very beginning of the second part of the furnace were covered by a deposit (Figure 1a) containing chromium, germanium, and oxygen (Supporting Information File 1, Figure S1)

  • Linear EDX analysis (Figure 2) and elemental mapping (Supporting Information File 1, Figure S3) of a single nanowire showed that it was composed of Cr, Ge, O and C

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Summary

Introduction

Metal silicides and germanides belong to an extensively studied group of materials offering a wide variety of properties to meet various requirements in battery, optical, and electronic applications, as well as catalysis. Molybdenum substrates that were placed at the very beginning of the second part of the furnace were covered by a deposit (Figure 1a) containing chromium, germanium, and oxygen (Supporting Information File 1, Figure S1). Linear EDX analysis (Figure 2) and elemental mapping (Supporting Information File 1, Figure S3) of a single nanowire showed that it was composed of Cr, Ge, O (from an oxidized surface) and C (a standard impurity in EDX instruments).

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