Abstract
The chemical transport of Ga2O3 with chlorine as a transporting agent has been investigated. Thermochemical properties of gallium chlorides have been considered on the basis of literature data. Thermodynamic analysis of transport reactions at 600 to 1500 K has been performed and GaCl3 was found the predominant gallium chloride in the vapour phase. The crystallization temperature of about 1150 to 1250 K proved to be the best conditions for the crystal growth ofβ-Ga2O3.
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