Abstract
The degree of oxidization of Ag in the interface of ZnO/Ag has been investigated by utilizing the matrix effect. We monitored various secondary ions (Ag +, CsAg +, Ag −, AgO −) under Cs + bombardment during the depth profile analysis. It was found that Ag +, Ag −, AgO − secondary ions exhibited a characteristic enhancement of secondary ion yield due to the matrix effect in the interface. Furthermore, the characteristic enhancement of AgO − secondary ion yield was not observed in the measurement with the use of oxygen flooding. These results suggest that the characteristic enhancement of AgO − secondary ion yield is mainly ascribed to the existence of the oxygen in the interface. On the basis of the results, the degree of the oxidization of Ag near the interface of ZnO/Ag by using AgO − was estimated.
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