Abstract
The possibility of chemical state analysis with a wavelength-dispersive X-ray spectrometer system for particle-induced X-ray emission (WDX-PIXE) using a light ion microbeam is described. High-resolution Cu Lα 1,2 and Lβ 1 X-ray spectra from Cu, Cu 2O and CuO targets are measured using this spectrometer system. The incident microbeam is focused 2.0 MeV protons with a beam size of 100(H)×30(V) μm 2. The Cu L X-ray spectra show two clear main peaks and their satellites. The main peaks are the Lα 1,2 and the Lβ 1 diagram lines, respectively. Due to a high detection efficiency of our spectrometer equipped with a position-sensitive detector for soft X-rays, the intensity ratio Lβ 1/Lα 1,2 is observable, which is the lowest for pure Cu metal, and the largest for CuO. Moreover, the Lα 1,2 X-ray spectrum for CuO shows a large shoulder at the high energy side of the main peak, which is considered to be due to the chemical bonding between Cu and O atoms. The results show that this system can be used for chemical state analysis for various compound materials and for analyzing small areas of materials or small particles.
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