Abstract
Examples are given of particle ejection from targets in which the chemical nature of the emitted particles differs from that of the bombarded solid. 1) When simple molecules like CO, NH 3 and H 2O are condensed and bombarded with ions, various radicals and molecules are newly formed and sputtered. The results have astrophysical implications: complicated molecules found in space might originate from such a process. 2) Ion bombardment of silicon in a halogen atmosphere leads to efficient target removal in which various molecules are ejected. The results are of interest for plasma etching processes. Insight into the processes involved is obtained from measurements of the time-of-flight distributions of the ejected molecules.
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