Abstract
A one-port SAW resonator incorporating Langmuir-Blodgett (LB) films has been investigated for a sensing element of chemical sensor. A 90 MHz SAW chemical sensor have been fabricated on ST cut quartz substrate and one-port resonator configuration have been used as a sensing element. Selective coatings have been deposited by the Langmuir-Blodgett method. The resonance frequency and the Q value have been measured as sensor response. Experimental results shown that the Q value and the resonance frequency of the one-port SAW resonator varied with the mass loading on SAW device surface. Especially, it was found that the measurement of Q value is very suitable for SAW sensor response.
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