Abstract
Chemical processing using supercritical carbon dioxide fluid (scCO2) was demonstrated for lowering processing temperature of sol-gel-derived metal oxide thin films. The film processing was performed in a hot-wall closed vessel filled with scCO2 fluid. Precursor films of titanium dioxide (TiO2) on soda-glass substrates prepared by sol-gel coating using Ti-alkoxide solution were converted to crystalline TiO2 (anatase) films successfully by the scCO2 treatment at a fluid pressure of 15 MPa and a substrate temperature of 300°C whereas no crystallization was occurred by conventional heat treatment at 400°C. XPS analysis indicated that the interface reaction related to Si element was suppressed successfully by scCO2 treatment at 300°C. These results suggest that the sol-gel synthesis using scCO2 fluid would be a cadidate for low-temperature processing of crystalline oxide films, which is more preferable than conventional techniques based on the heat treatment.
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