Abstract
Chemical polishing (CP) was selected to develop a practical surface treatment for stainless steel for vacuum purposes. The outgassing properties of chemically polished samples being made of three industrial production forms of material; SUS304L plates, pipes, and bars were examined. The outgassing properties of the CP samples were almost the same as those of electrolytically polished (EP) samples, whereas the properties of the pipe, plate and bar material were different. As a final test, the results of a CP chamber were compared with those of an EP chamber after baking. The outgassing rate of CP chamber was the same as that of the EP one. Both samples with different surface treatments showed the same value, 1×10 -9 Pa m s -1, at the ultimate pressure at 28°C.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
