Abstract
AbstractWe have been investigating several chemical microsensor technologies for the detection of chemicals found in propellant and rocket exhaust plumes and as contaminants for satellite components. In this work we have developed a catalytic metal sensor for the detection of H2contamination in electronic device packages. The sensor is based on the resistance of a thin film Pd/Ni alloy. Data have been obtained on its response at room temperature to various levels of H2as well as the effects of H2O and O2on its performance. Hydrogen levels to 10.5 ppm have been detected and the responsivity is about twice that of similar sensors. The sensor is insensitive to H2O but its response to H2is strongly inhibited by O2.
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