Chemical mechanisms inducing a dc current measured in the flowing post-discharge of an RF He–O2 plasma torch

Abstract

The post-discharge of an RF plasma torch supplied with helium and oxygen gases is characterized by mass spectrometry, optical emission spectroscopy and electrical measurements. We have proved the existence of a dc current in the post-discharge (1–20 µA), attributed to the Penning ionization of atmospheric nitrogen and oxygenated species. The mechanisms ruling this dc current are investigated through experiments in which we discuss the influence of the O2 flow rate, the He flow rate and the distance separating the plasma torch from a material surface located downstream.