Abstract
We have investigated the thermal reaction of a negative photoresist (cyclized polyisoprene + bis(4‐azidobenzal)cyclohexanone) by infrared spectroscopy. Two major thermal crosslinking reactions were observed, one is the oxidatiye polymerization of cyclized polyisoprene and the other is the decomposition of bisazide. At 100°C, the oxidative crosslinking in air proceeds about three times faster than the bisazide crosslinking. The activation energies of these reactions were determined as 32 and 23 kcal/mole, respectively. Extensive crosslinking of cyclized polyisoprene tends to retard the bisazide decomposition reaction. This retardation is attributed to a cage effect of the increasing rigid matrix.
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