Abstract

Chemical mechanical grinding (CMG) was applied in machining K9 optical glass. Eight types of CMG wheels were developed and their dry grinding performances were analyzed. The specific CMG wheel which contained 28%vol.abrasive,20%vol.porous and certain additives obtained satisfied surface quality and material removal rate, as result that the solid state reaction and mechanical elimination reached equilibrium. The CMG process parameters, including pressure, workpiece speed and wheel speed, were optimized by using orthogonal experimental method. The surface roughness can reach 0.461nm in Ra on the basis of optimized processing parameters.

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