Abstract
The ability to quantitatively map the distribution of elements on the micrometer scale and smaller with high sensitivity and isotopic discrimination is unique to ion microscopy. This capability is a powerful tool for investigation of the solid state, where properties correlate not only with chemical composition but also with the degree of chemical heterogeneity. The use of digital image processing allows for the quantitative study of ion images, as well as the extraction of quantitative information from the image data. The use of image processing techniques to acquire, amend, and analyze ion images is discussed. Methods for the identification and correction of contrast artifacts, and the application of ion microscopy to problems in biology and medicine are presented.
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