Abstract
The effect of hydrogen plasma erosion of glassy carbon implanted with tungsten has been studied for a dose of 2.5×1016 ions/cm2 and an average ion energy of 60 keV. Raman measurements of the tungsten-implanted layer prior to and after exposure to the hydrogen plasma revealed that the damaged layer induced by tungsten ion bombardment, unlike by C+ bombardment, has not been completely removed in the plasma erosion process. Auger profile measurements were performed on the as-implanted layer and after exposure to a hydrogen plasma for 1 h. By comparing the tungsten depth distribution for these two cases the hydrogen plasma erosion rate of tungsten-implanted glassy carbon has been estimated. It has been found that during the first hour of exposure to the hydrogen plasma the average erosion rate of the implanted layer was estimated to be 265±35 Å/h. In contrast the erosion rate of unimplanted glassy carbon in the hydrogen plasma was found to be 3000±300 Å/h.
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