Abstract
The authors present a simple and efficient technique for producing hexagonalarrays of nanostructures on silicon surfaces in chemical solutions. It utilizes theeffect of optical near-field enhancement by self-assembled particle-lens arraysand a thermally induced chemical reaction with an alkaline solution. About108 features can be produced simultaneously by one single laser pulse. Furthermore,the shape of the structures was found to be controllable, from concave holes toconvex bumps, by means of a post-etching process, in the same chemical solution.
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