Chemical and Topographical Changes upon Sub‐100‐nm Laser‐Induced Periodic Surface Structure Formation on Titanium Alloy: The Influence of Laser Pulse Repetition Rate and Number of Over‐Scans

Abstract

Titanium and its alloys are known to allow the straightforward laser‐based manufacturing of ordered surface nanostructures, so‐called high spatial frequency laser‐induced periodic surface structures (HSFL). These structures exhibit sub‐100 nm spatial periods – far below the optical diffraction limit. The resulting surface functionalities are usually enabled by both, topographic and chemical alterations of the nanostructured surfaces. For exploring these effects, multi‐method characterizations were performed here for HSFL processed on Ti–6Al–4V alloy upon irradiation with near‐infrared ps‐laser pulses (1030 nm, ≈1 ps pulse duration, 1–400 kHz) under different laser scan processing conditions, i.e., by systematically varying the pulse repetition frequency and the number of laser irradiation passes. The sample characterization involved morphological and topographical investigations by scanning electron microscopy (SEM), atomic force microscopy (AFM), tactile stylus profilometry, as well as near‐surface chemical analyses hard X‐ray photoelectron spectroscopy (HAXPES) and depth‐profiling time‐of‐flight secondary ion mass spectrometry (ToF‐SIMS). This provides a quantification of the laser ablation depth, the geometrical HSFL characteristics and enables new insights into the depth extent and the nature of the non‐ablative laser‐induced near‐surface oxidation accompanying these nanostructures. This allows to answer the questions how the processing of HSFL can be industrially scaled up, and whether the latter is limited by heat‐accumulation effects.