ChemFET Sensor: nanorods of nickel-substituted Metal–Organic framework for detection of SO2

Abstract

The ChemFET-based nanorods of nickel substituted Metal–Organic framework (MOF) were explored for detection of SO2 gas analytes. Nanorods of nickel based MOF (Ni3HHTP2) were synthesized by chemical method at 90 °C temperature. The structural, surface morphological and spectroscopic characterizations were explored using X-ray diffraction (XRD), Atomic Force Microscopy (AFM), Scanning Electron Microscopy (SEM) and Fourier Transformation Infrared (FTIR), respectively. The back gated Field Effect Transistor (FET) was constructed using gold microelectrodes having 3 µm gap referring as source and drain on silicon/silicon dioxide (gate) substrate and Ni3HHTP2 MOF used to bridge channel between source and drain. The transfer and output characteristics of Ni3HHTP2 MOF based FET were studied in present investigation. Sensing behaviors of Ni3HHTP2 MOF based FET was explored at lower detection limit 625 ppb (which is well below than permeable exposure level (PEL) level of SO2 suggested by OSHA) for SO2 gas analytes. Ni3HHTP2 MOF based FET shows p type behavior with carrier mobility 8.5 × 10–2 cm2/Vs and threshold voltage (VTH = 0.6 V).